5/6/2010	10:31:32 AM	Program exited cleanly
5/6/2010	10:31:35 AM	Program started normally
5/6/2010	10:31:35 AM	Helium valve closed
5/6/2010	10:31:35 AM	H2 valve closed
5/6/2010	10:31:35 AM	BCl3 valve closed
5/6/2010	10:31:35 AM	PH3 valve closed
5/6/2010	10:31:35 AM	SiCl4 pre valve closed
5/6/2010	10:31:35 AM	SiCl4 post valve closed
5/6/2010	10:31:35 AM	Main Vac valve closed
5/6/2010	10:31:35 AM	Bypass valve closed
5/6/2010	10:31:35 AM	Bubbler valve closed
5/6/2010	10:31:35 AM	Helium MFC set to  0.000000
5/6/2010	10:31:35 AM	H2 MFC set to  0.000000
5/6/2010	10:31:35 AM	BCl3 MFC set to  0.000000
5/6/2010	10:31:35 AM	SiCl4 MFC set to  0.000000
5/6/2010	10:31:35 AM	Bypass solenoid MFC set to  760.000000
5/6/2010	10:31:35 AM	Tube furnace set to 0
5/6/2010	10:31:37 AM	Bypass valve opened
5/6/2010	10:31:37 AM	Main Vac valve opened
5/6/2010	1:15:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/6/2010	1:15:29 PM	Recipe started at 1:15 PM
5/6/2010	1:15:29 PM	H2 valve closed
5/6/2010	1:15:29 PM	BCl3 valve closed
5/6/2010	1:15:29 PM	PH3 valve closed
5/6/2010	1:15:29 PM	SiCl4 pre valve closed
5/6/2010	1:15:29 PM	SiCl4 post valve closed
5/6/2010	1:15:29 PM	Main Vac valve closed
5/6/2010	1:15:29 PM	Bypass valve closed
5/6/2010	1:15:29 PM	Bubbler valve closed
5/6/2010	1:15:29 PM	Helium valve opened
5/6/2010	1:15:29 PM	Helium MFC set to  500.000000
5/6/2010	1:15:29 PM	H2 MFC set to  0.000000
5/6/2010	1:15:29 PM	BCl3 MFC set to  0.000000
5/6/2010	1:15:29 PM	SiCl4 MFC set to  0.000000
5/6/2010	1:15:29 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	1:15:29 PM	Tube furnace set to 0
5/6/2010	1:16:49 PM	Helium valve closed
5/6/2010	1:16:49 PM	H2 valve closed
5/6/2010	1:16:49 PM	BCl3 valve closed
5/6/2010	1:16:49 PM	PH3 valve closed
5/6/2010	1:16:49 PM	SiCl4 pre valve closed
5/6/2010	1:16:49 PM	SiCl4 post valve closed
5/6/2010	1:16:49 PM	Main Vac valve closed
5/6/2010	1:16:49 PM	Bypass valve closed
5/6/2010	1:16:49 PM	Bubbler valve closed
5/6/2010	1:16:49 PM	Helium MFC set to  0.000000
5/6/2010	1:16:49 PM	H2 MFC set to  0.000000
5/6/2010	1:16:49 PM	BCl3 MFC set to  0.000000
5/6/2010	1:16:49 PM	SiCl4 MFC set to  0.000000
5/6/2010	1:16:49 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	1:16:50 PM	Tube furnace set to 0
5/6/2010	1:16:50 PM	Run finished at 1:16 PM
5/6/2010	1:16:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/6/2010	1:34:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/6/2010	1:34:26 PM	Recipe started at 1:34 PM
5/6/2010	1:34:26 PM	H2 valve closed
5/6/2010	1:34:26 PM	BCl3 valve closed
5/6/2010	1:34:26 PM	PH3 valve closed
5/6/2010	1:34:26 PM	SiCl4 pre valve closed
5/6/2010	1:34:26 PM	SiCl4 post valve closed
5/6/2010	1:34:26 PM	Main Vac valve closed
5/6/2010	1:34:26 PM	Bypass valve closed
5/6/2010	1:34:26 PM	Bubbler valve closed
5/6/2010	1:34:26 PM	Helium valve opened
5/6/2010	1:34:26 PM	Helium MFC set to  500.000000
5/6/2010	1:34:26 PM	H2 MFC set to  0.000000
5/6/2010	1:34:26 PM	BCl3 MFC set to  0.000000
5/6/2010	1:34:26 PM	SiCl4 MFC set to  0.000000
5/6/2010	1:34:26 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	1:34:27 PM	Tube furnace set to 0
5/6/2010	1:34:29 PM	Helium valve closed
5/6/2010	1:34:29 PM	H2 valve closed
5/6/2010	1:34:29 PM	BCl3 valve closed
5/6/2010	1:34:29 PM	PH3 valve closed
5/6/2010	1:34:29 PM	SiCl4 pre valve closed
5/6/2010	1:34:29 PM	SiCl4 post valve closed
5/6/2010	1:34:29 PM	Main Vac valve closed
5/6/2010	1:34:29 PM	Bypass valve closed
5/6/2010	1:34:29 PM	Bubbler valve closed
5/6/2010	1:34:29 PM	Helium MFC set to  0.000000
5/6/2010	1:34:29 PM	H2 MFC set to  0.000000
5/6/2010	1:34:29 PM	BCl3 MFC set to  0.000000
5/6/2010	1:34:29 PM	SiCl4 MFC set to  0.000000
5/6/2010	1:34:29 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	1:34:29 PM	Tube furnace set to 0
5/6/2010	1:34:44 PM	Helium valve closed
5/6/2010	1:34:44 PM	H2 valve closed
5/6/2010	1:34:44 PM	BCl3 valve closed
5/6/2010	1:34:44 PM	PH3 valve closed
5/6/2010	1:34:44 PM	SiCl4 pre valve closed
5/6/2010	1:34:44 PM	SiCl4 post valve closed
5/6/2010	1:34:44 PM	Main Vac valve closed
5/6/2010	1:34:44 PM	Bubbler valve closed
5/6/2010	1:34:44 PM	Bypass valve opened
5/6/2010	1:34:44 PM	Helium MFC set to  0.000000
5/6/2010	1:34:44 PM	H2 MFC set to  0.000000
5/6/2010	1:34:44 PM	BCl3 MFC set to  0.000000
5/6/2010	1:34:44 PM	SiCl4 MFC set to  0.000000
5/6/2010	1:34:44 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	1:34:44 PM	Tube furnace set to 0
5/6/2010	1:35:14 PM	Run aborted at 1:35 PM
5/6/2010	1:35:14 PM	Helium valve closed
5/6/2010	1:35:14 PM	H2 valve closed
5/6/2010	1:35:14 PM	BCl3 valve closed
5/6/2010	1:35:14 PM	PH3 valve closed
5/6/2010	1:35:14 PM	SiCl4 pre valve closed
5/6/2010	1:35:14 PM	SiCl4 post valve closed
5/6/2010	1:35:14 PM	Bypass valve closed
5/6/2010	1:35:14 PM	Main Vac valve closed
5/6/2010	1:35:14 PM	Bubbler valve closed
5/6/2010	1:35:14 PM	Helium MFC set to  0.000000
5/6/2010	1:35:14 PM	H2 MFC set to  0.000000
5/6/2010	1:35:14 PM	BCl3 MFC set to  0.000000
5/6/2010	1:35:14 PM	SiCl4 MFC set to  0.000000
5/6/2010	1:35:14 PM	Tube furnace set to 0
5/6/2010	1:35:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/6/2010	1:58:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2010	1:58:59 PM	Recipe started at 1:58 PM
5/6/2010	1:58:59 PM	Helium valve closed
5/6/2010	1:58:59 PM	H2 valve closed
5/6/2010	1:58:59 PM	BCl3 valve closed
5/6/2010	1:58:59 PM	PH3 valve closed
5/6/2010	1:58:59 PM	SiCl4 pre valve closed
5/6/2010	1:58:59 PM	SiCl4 post valve closed
5/6/2010	1:58:59 PM	Main Vac valve closed
5/6/2010	1:58:59 PM	Bubbler valve closed
5/6/2010	1:58:59 PM	Bypass valve opened
5/6/2010	1:58:59 PM	Helium MFC set to  0.000000
5/6/2010	1:58:59 PM	H2 MFC set to  0.000000
5/6/2010	1:58:59 PM	BCl3 MFC set to  0.000000
5/6/2010	1:58:59 PM	SiCl4 MFC set to  0.000000
5/6/2010	1:58:59 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	1:58:59 PM	Tube furnace set to 0
5/6/2010	1:59:11 PM	Helium valve closed
5/6/2010	1:59:11 PM	H2 valve closed
5/6/2010	1:59:11 PM	BCl3 valve closed
5/6/2010	1:59:11 PM	PH3 valve closed
5/6/2010	1:59:11 PM	SiCl4 pre valve closed
5/6/2010	1:59:11 PM	SiCl4 post valve closed
5/6/2010	1:59:11 PM	Bubbler valve closed
5/6/2010	1:59:11 PM	Main Vac valve opened
5/6/2010	1:59:11 PM	Bypass valve opened
5/6/2010	1:59:11 PM	Helium MFC set to  0.000000
5/6/2010	1:59:11 PM	H2 MFC set to  0.000000
5/6/2010	1:59:11 PM	BCl3 MFC set to  0.000000
5/6/2010	1:59:11 PM	SiCl4 MFC set to  0.000000
5/6/2010	1:59:11 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	1:59:11 PM	Tube furnace set to 0
5/6/2010	1:59:12 PM	Run finished at 1:59 PM
5/6/2010	1:59:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2010	2:51:17 PM	Bypass valve closed
5/6/2010	2:51:17 PM	Main Vac valve closed
5/6/2010	2:51:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/6/2010	2:51:36 PM	Recipe started at 2:51 PM
5/6/2010	2:51:36 PM	H2 valve closed
5/6/2010	2:51:36 PM	BCl3 valve closed
5/6/2010	2:51:36 PM	PH3 valve closed
5/6/2010	2:51:36 PM	SiCl4 pre valve closed
5/6/2010	2:51:36 PM	SiCl4 post valve closed
5/6/2010	2:51:36 PM	Main Vac valve closed
5/6/2010	2:51:36 PM	Bypass valve closed
5/6/2010	2:51:36 PM	Bubbler valve closed
5/6/2010	2:51:36 PM	Helium valve opened
5/6/2010	2:51:36 PM	Helium MFC set to  500.000000
5/6/2010	2:51:36 PM	H2 MFC set to  0.000000
5/6/2010	2:51:36 PM	BCl3 MFC set to  0.000000
5/6/2010	2:51:36 PM	SiCl4 MFC set to  0.000000
5/6/2010	2:51:36 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	2:51:36 PM	Tube furnace set to 0
5/6/2010	2:52:56 PM	Helium valve closed
5/6/2010	2:52:56 PM	H2 valve closed
5/6/2010	2:52:56 PM	BCl3 valve closed
5/6/2010	2:52:56 PM	PH3 valve closed
5/6/2010	2:52:56 PM	SiCl4 pre valve closed
5/6/2010	2:52:56 PM	SiCl4 post valve closed
5/6/2010	2:52:56 PM	Main Vac valve closed
5/6/2010	2:52:56 PM	Bypass valve closed
5/6/2010	2:52:56 PM	Bubbler valve closed
5/6/2010	2:52:56 PM	Helium MFC set to  0.000000
5/6/2010	2:52:56 PM	H2 MFC set to  0.000000
5/6/2010	2:52:56 PM	BCl3 MFC set to  0.000000
5/6/2010	2:52:56 PM	SiCl4 MFC set to  0.000000
5/6/2010	2:52:56 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	2:52:56 PM	Tube furnace set to 0
5/6/2010	2:52:56 PM	Run finished at 2:52 PM
5/6/2010	2:52:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/6/2010	2:53:03 PM	Helium MFC set to  500.000000
5/6/2010	2:53:35 PM	Helium valve opened
5/6/2010	2:53:40 PM	Bubbler valve opened
5/6/2010	3:07:29 PM	Helium valve closed
5/6/2010	3:07:30 PM	Bubbler valve closed
5/6/2010	3:07:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2010	3:07:54 PM	Recipe started at 3:07 PM
5/6/2010	3:07:54 PM	Helium valve closed
5/6/2010	3:07:54 PM	H2 valve closed
5/6/2010	3:07:54 PM	BCl3 valve closed
5/6/2010	3:07:54 PM	PH3 valve closed
5/6/2010	3:07:54 PM	SiCl4 pre valve closed
5/6/2010	3:07:54 PM	SiCl4 post valve closed
5/6/2010	3:07:54 PM	Main Vac valve closed
5/6/2010	3:07:54 PM	Bubbler valve closed
5/6/2010	3:07:54 PM	Bypass valve opened
5/6/2010	3:07:54 PM	Helium MFC set to  0.000000
5/6/2010	3:07:54 PM	H2 MFC set to  0.000000
5/6/2010	3:07:54 PM	BCl3 MFC set to  0.000000
5/6/2010	3:07:54 PM	SiCl4 MFC set to  0.000000
5/6/2010	3:07:54 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	3:07:54 PM	Tube furnace set to 0
5/6/2010	3:08:25 PM	Helium valve closed
5/6/2010	3:08:25 PM	H2 valve closed
5/6/2010	3:08:25 PM	BCl3 valve closed
5/6/2010	3:08:25 PM	PH3 valve closed
5/6/2010	3:08:25 PM	SiCl4 pre valve closed
5/6/2010	3:08:25 PM	SiCl4 post valve closed
5/6/2010	3:08:25 PM	Bubbler valve closed
5/6/2010	3:08:25 PM	Main Vac valve opened
5/6/2010	3:08:25 PM	Bypass valve opened
5/6/2010	3:08:25 PM	Helium MFC set to  0.000000
5/6/2010	3:08:25 PM	H2 MFC set to  0.000000
5/6/2010	3:08:25 PM	BCl3 MFC set to  0.000000
5/6/2010	3:08:25 PM	SiCl4 MFC set to  0.000000
5/6/2010	3:08:25 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	3:08:25 PM	Tube furnace set to 0
5/6/2010	3:08:25 PM	Run finished at 3:08 PM
5/6/2010	3:08:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2010	8:07:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/6/2010	8:07:27 PM	Recipe started at 8:07 PM
5/6/2010	8:07:27 PM	H2 valve closed
5/6/2010	8:07:27 PM	BCl3 valve closed
5/6/2010	8:07:27 PM	PH3 valve closed
5/6/2010	8:07:27 PM	SiCl4 pre valve closed
5/6/2010	8:07:27 PM	SiCl4 post valve closed
5/6/2010	8:07:27 PM	Main Vac valve closed
5/6/2010	8:07:27 PM	Bypass valve closed
5/6/2010	8:07:27 PM	Bubbler valve closed
5/6/2010	8:07:27 PM	Helium valve opened
5/6/2010	8:07:27 PM	Helium MFC set to  500.000000
5/6/2010	8:07:27 PM	H2 MFC set to  0.000000
5/6/2010	8:07:27 PM	BCl3 MFC set to  0.000000
5/6/2010	8:07:27 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:07:27 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:07:27 PM	Tube furnace set to 0
5/6/2010	8:08:47 PM	Helium valve closed
5/6/2010	8:08:47 PM	H2 valve closed
5/6/2010	8:08:47 PM	BCl3 valve closed
5/6/2010	8:08:47 PM	PH3 valve closed
5/6/2010	8:08:47 PM	SiCl4 pre valve closed
5/6/2010	8:08:47 PM	SiCl4 post valve closed
5/6/2010	8:08:47 PM	Main Vac valve closed
5/6/2010	8:08:47 PM	Bypass valve closed
5/6/2010	8:08:47 PM	Bubbler valve closed
5/6/2010	8:08:47 PM	Helium MFC set to  0.000000
5/6/2010	8:08:47 PM	H2 MFC set to  0.000000
5/6/2010	8:08:47 PM	BCl3 MFC set to  0.000000
5/6/2010	8:08:47 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:08:47 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:08:47 PM	Tube furnace set to 0
5/6/2010	8:08:48 PM	Run finished at 8:08 PM
5/6/2010	8:08:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/6/2010	8:10:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2010	8:10:25 PM	Recipe started at 8:10 PM
5/6/2010	8:10:25 PM	Helium valve closed
5/6/2010	8:10:25 PM	H2 valve closed
5/6/2010	8:10:25 PM	BCl3 valve closed
5/6/2010	8:10:25 PM	PH3 valve closed
5/6/2010	8:10:25 PM	SiCl4 pre valve closed
5/6/2010	8:10:25 PM	SiCl4 post valve closed
5/6/2010	8:10:25 PM	Main Vac valve closed
5/6/2010	8:10:25 PM	Bubbler valve closed
5/6/2010	8:10:25 PM	Bypass valve opened
5/6/2010	8:10:25 PM	Helium MFC set to  0.000000
5/6/2010	8:10:25 PM	H2 MFC set to  0.000000
5/6/2010	8:10:25 PM	BCl3 MFC set to  0.000000
5/6/2010	8:10:25 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:10:25 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:10:25 PM	Tube furnace set to 0
5/6/2010	8:10:55 PM	Helium valve closed
5/6/2010	8:10:55 PM	H2 valve closed
5/6/2010	8:10:55 PM	BCl3 valve closed
5/6/2010	8:10:55 PM	PH3 valve closed
5/6/2010	8:10:55 PM	SiCl4 pre valve closed
5/6/2010	8:10:55 PM	SiCl4 post valve closed
5/6/2010	8:10:55 PM	Bubbler valve closed
5/6/2010	8:10:55 PM	Main Vac valve opened
5/6/2010	8:10:55 PM	Bypass valve opened
5/6/2010	8:10:55 PM	Helium MFC set to  0.000000
5/6/2010	8:10:55 PM	H2 MFC set to  0.000000
5/6/2010	8:10:55 PM	BCl3 MFC set to  0.000000
5/6/2010	8:10:55 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:10:55 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:10:56 PM	Tube furnace set to 0
5/6/2010	8:10:56 PM	Run finished at 8:10 PM
5/6/2010	8:10:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2010	8:10:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/6/2010	8:10:59 PM	Recipe started at 8:10 PM
5/6/2010	8:10:59 PM	H2 valve closed
5/6/2010	8:10:59 PM	BCl3 valve closed
5/6/2010	8:10:59 PM	PH3 valve closed
5/6/2010	8:10:59 PM	SiCl4 pre valve closed
5/6/2010	8:10:59 PM	SiCl4 post valve closed
5/6/2010	8:10:59 PM	Main Vac valve closed
5/6/2010	8:10:59 PM	Bypass valve closed
5/6/2010	8:10:59 PM	Bubbler valve closed
5/6/2010	8:10:59 PM	Helium valve opened
5/6/2010	8:10:59 PM	Helium MFC set to  500.000000
5/6/2010	8:10:59 PM	H2 MFC set to  0.000000
5/6/2010	8:10:59 PM	BCl3 MFC set to  0.000000
5/6/2010	8:10:59 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:10:59 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:10:59 PM	Tube furnace set to 0
5/6/2010	8:12:19 PM	Helium valve closed
5/6/2010	8:12:19 PM	H2 valve closed
5/6/2010	8:12:19 PM	BCl3 valve closed
5/6/2010	8:12:19 PM	PH3 valve closed
5/6/2010	8:12:19 PM	SiCl4 pre valve closed
5/6/2010	8:12:19 PM	SiCl4 post valve closed
5/6/2010	8:12:19 PM	Main Vac valve closed
5/6/2010	8:12:19 PM	Bypass valve closed
5/6/2010	8:12:19 PM	Bubbler valve closed
5/6/2010	8:12:19 PM	Helium MFC set to  0.000000
5/6/2010	8:12:19 PM	H2 MFC set to  0.000000
5/6/2010	8:12:19 PM	BCl3 MFC set to  0.000000
5/6/2010	8:12:19 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:12:19 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:12:19 PM	Tube furnace set to 0
5/6/2010	8:12:19 PM	Run finished at 8:12 PM
5/6/2010	8:12:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/6/2010	8:15:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2010	8:15:54 PM	Recipe started at 8:15 PM
5/6/2010	8:15:54 PM	Helium valve closed
5/6/2010	8:15:54 PM	H2 valve closed
5/6/2010	8:15:54 PM	BCl3 valve closed
5/6/2010	8:15:54 PM	PH3 valve closed
5/6/2010	8:15:54 PM	SiCl4 pre valve closed
5/6/2010	8:15:54 PM	SiCl4 post valve closed
5/6/2010	8:15:54 PM	Main Vac valve closed
5/6/2010	8:15:54 PM	Bubbler valve closed
5/6/2010	8:15:54 PM	Bypass valve opened
5/6/2010	8:15:54 PM	Helium MFC set to  0.000000
5/6/2010	8:15:54 PM	H2 MFC set to  0.000000
5/6/2010	8:15:54 PM	BCl3 MFC set to  0.000000
5/6/2010	8:15:54 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:15:54 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:15:54 PM	Tube furnace set to 0
5/6/2010	8:16:36 PM	Helium valve closed
5/6/2010	8:16:36 PM	H2 valve closed
5/6/2010	8:16:36 PM	BCl3 valve closed
5/6/2010	8:16:36 PM	PH3 valve closed
5/6/2010	8:16:36 PM	SiCl4 pre valve closed
5/6/2010	8:16:36 PM	SiCl4 post valve closed
5/6/2010	8:16:36 PM	Bubbler valve closed
5/6/2010	8:16:36 PM	Main Vac valve opened
5/6/2010	8:16:36 PM	Bypass valve opened
5/6/2010	8:16:36 PM	Helium MFC set to  0.000000
5/6/2010	8:16:36 PM	H2 MFC set to  0.000000
5/6/2010	8:16:36 PM	BCl3 MFC set to  0.000000
5/6/2010	8:16:36 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:16:36 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:16:36 PM	Tube furnace set to 0
5/6/2010	8:16:37 PM	Run finished at 8:16 PM
5/6/2010	8:16:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2010	8:16:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/6/2010	8:16:56 PM	Recipe started at 8:16 PM
5/6/2010	8:16:56 PM	H2 valve closed
5/6/2010	8:16:56 PM	BCl3 valve closed
5/6/2010	8:16:56 PM	PH3 valve closed
5/6/2010	8:16:56 PM	SiCl4 pre valve closed
5/6/2010	8:16:56 PM	SiCl4 post valve closed
5/6/2010	8:16:56 PM	Main Vac valve closed
5/6/2010	8:16:56 PM	Bypass valve closed
5/6/2010	8:16:56 PM	Bubbler valve closed
5/6/2010	8:16:56 PM	Helium valve opened
5/6/2010	8:16:56 PM	Helium MFC set to  500.000000
5/6/2010	8:16:56 PM	H2 MFC set to  0.000000
5/6/2010	8:16:56 PM	BCl3 MFC set to  0.000000
5/6/2010	8:16:56 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:16:56 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:16:56 PM	Tube furnace set to 0
5/6/2010	8:18:18 PM	Helium valve closed
5/6/2010	8:18:18 PM	H2 valve closed
5/6/2010	8:18:18 PM	BCl3 valve closed
5/6/2010	8:18:18 PM	PH3 valve closed
5/6/2010	8:18:18 PM	SiCl4 pre valve closed
5/6/2010	8:18:18 PM	SiCl4 post valve closed
5/6/2010	8:18:18 PM	Main Vac valve closed
5/6/2010	8:18:18 PM	Bypass valve closed
5/6/2010	8:18:18 PM	Bubbler valve closed
5/6/2010	8:18:18 PM	Helium MFC set to  0.000000
5/6/2010	8:18:18 PM	H2 MFC set to  0.000000
5/6/2010	8:18:18 PM	BCl3 MFC set to  0.000000
5/6/2010	8:18:18 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:18:18 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:18:19 PM	Tube furnace set to 0
5/6/2010	8:18:34 PM	Helium valve closed
5/6/2010	8:18:34 PM	H2 valve closed
5/6/2010	8:18:34 PM	BCl3 valve closed
5/6/2010	8:18:34 PM	PH3 valve closed
5/6/2010	8:18:34 PM	SiCl4 pre valve closed
5/6/2010	8:18:34 PM	SiCl4 post valve closed
5/6/2010	8:18:34 PM	Main Vac valve closed
5/6/2010	8:18:34 PM	Bubbler valve closed
5/6/2010	8:18:34 PM	Bypass valve opened
5/6/2010	8:18:34 PM	Helium MFC set to  0.000000
5/6/2010	8:18:34 PM	H2 MFC set to  0.000000
5/6/2010	8:18:34 PM	BCl3 MFC set to  0.000000
5/6/2010	8:18:34 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:18:34 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:18:34 PM	Tube furnace set to 0
5/6/2010	8:19:04 PM	Helium valve closed
5/6/2010	8:19:04 PM	H2 valve closed
5/6/2010	8:19:04 PM	BCl3 valve closed
5/6/2010	8:19:04 PM	PH3 valve closed
5/6/2010	8:19:04 PM	SiCl4 pre valve closed
5/6/2010	8:19:04 PM	SiCl4 post valve closed
5/6/2010	8:19:04 PM	Bubbler valve closed
5/6/2010	8:19:04 PM	Main Vac valve opened
5/6/2010	8:19:04 PM	Bypass valve opened
5/6/2010	8:19:04 PM	Helium MFC set to  0.000000
5/6/2010	8:19:04 PM	H2 MFC set to  0.000000
5/6/2010	8:19:04 PM	BCl3 MFC set to  0.000000
5/6/2010	8:19:04 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:19:04 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:19:05 PM	Tube furnace set to 0
5/6/2010	8:24:05 PM	H2 valve closed
5/6/2010	8:24:05 PM	BCl3 valve closed
5/6/2010	8:24:05 PM	PH3 valve closed
5/6/2010	8:24:05 PM	SiCl4 pre valve closed
5/6/2010	8:24:05 PM	SiCl4 post valve closed
5/6/2010	8:24:05 PM	Main Vac valve closed
5/6/2010	8:24:05 PM	Bypass valve closed
5/6/2010	8:24:05 PM	Bubbler valve closed
5/6/2010	8:24:05 PM	Helium valve opened
5/6/2010	8:24:05 PM	Helium MFC set to  500.000000
5/6/2010	8:24:05 PM	H2 MFC set to  0.000000
5/6/2010	8:24:05 PM	BCl3 MFC set to  0.000000
5/6/2010	8:24:05 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:24:05 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:24:05 PM	Tube furnace set to 0
5/6/2010	8:25:27 PM	Helium valve closed
5/6/2010	8:25:27 PM	H2 valve closed
5/6/2010	8:25:27 PM	BCl3 valve closed
5/6/2010	8:25:27 PM	PH3 valve closed
5/6/2010	8:25:27 PM	SiCl4 pre valve closed
5/6/2010	8:25:27 PM	SiCl4 post valve closed
5/6/2010	8:25:27 PM	Main Vac valve closed
5/6/2010	8:25:27 PM	Bypass valve closed
5/6/2010	8:25:27 PM	Bubbler valve closed
5/6/2010	8:25:27 PM	Helium MFC set to  0.000000
5/6/2010	8:25:27 PM	H2 MFC set to  0.000000
5/6/2010	8:25:27 PM	BCl3 MFC set to  0.000000
5/6/2010	8:25:27 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:25:27 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:25:27 PM	Tube furnace set to 0
5/6/2010	8:25:42 PM	Helium valve closed
5/6/2010	8:25:42 PM	H2 valve closed
5/6/2010	8:25:42 PM	BCl3 valve closed
5/6/2010	8:25:42 PM	PH3 valve closed
5/6/2010	8:25:42 PM	SiCl4 pre valve closed
5/6/2010	8:25:42 PM	SiCl4 post valve closed
5/6/2010	8:25:42 PM	Main Vac valve closed
5/6/2010	8:25:42 PM	Bubbler valve closed
5/6/2010	8:25:42 PM	Bypass valve opened
5/6/2010	8:25:42 PM	Helium MFC set to  0.000000
5/6/2010	8:25:42 PM	H2 MFC set to  0.000000
5/6/2010	8:25:42 PM	BCl3 MFC set to  0.000000
5/6/2010	8:25:42 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:25:42 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:25:43 PM	Tube furnace set to 0
5/6/2010	8:26:13 PM	Helium valve closed
5/6/2010	8:26:13 PM	H2 valve closed
5/6/2010	8:26:13 PM	BCl3 valve closed
5/6/2010	8:26:13 PM	PH3 valve closed
5/6/2010	8:26:13 PM	SiCl4 pre valve closed
5/6/2010	8:26:13 PM	SiCl4 post valve closed
5/6/2010	8:26:13 PM	Bubbler valve closed
5/6/2010	8:26:13 PM	Main Vac valve opened
5/6/2010	8:26:13 PM	Bypass valve opened
5/6/2010	8:26:13 PM	Helium MFC set to  0.000000
5/6/2010	8:26:13 PM	H2 MFC set to  0.000000
5/6/2010	8:26:13 PM	BCl3 MFC set to  0.000000
5/6/2010	8:26:13 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:26:13 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:26:13 PM	Tube furnace set to 0
5/6/2010	8:31:13 PM	H2 valve closed
5/6/2010	8:31:13 PM	BCl3 valve closed
5/6/2010	8:31:13 PM	PH3 valve closed
5/6/2010	8:31:13 PM	SiCl4 pre valve closed
5/6/2010	8:31:13 PM	SiCl4 post valve closed
5/6/2010	8:31:13 PM	Main Vac valve closed
5/6/2010	8:31:13 PM	Bypass valve closed
5/6/2010	8:31:13 PM	Bubbler valve closed
5/6/2010	8:31:13 PM	Helium valve opened
5/6/2010	8:31:13 PM	Helium MFC set to  500.000000
5/6/2010	8:31:13 PM	H2 MFC set to  0.000000
5/6/2010	8:31:13 PM	BCl3 MFC set to  0.000000
5/6/2010	8:31:13 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:31:13 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:31:13 PM	Tube furnace set to 0
5/6/2010	8:32:36 PM	Helium valve closed
5/6/2010	8:32:36 PM	H2 valve closed
5/6/2010	8:32:36 PM	BCl3 valve closed
5/6/2010	8:32:36 PM	PH3 valve closed
5/6/2010	8:32:36 PM	SiCl4 pre valve closed
5/6/2010	8:32:36 PM	SiCl4 post valve closed
5/6/2010	8:32:36 PM	Main Vac valve closed
5/6/2010	8:32:36 PM	Bypass valve closed
5/6/2010	8:32:36 PM	Bubbler valve closed
5/6/2010	8:32:36 PM	Helium MFC set to  0.000000
5/6/2010	8:32:36 PM	H2 MFC set to  0.000000
5/6/2010	8:32:36 PM	BCl3 MFC set to  0.000000
5/6/2010	8:32:36 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:32:36 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:32:36 PM	Tube furnace set to 0
5/6/2010	8:32:51 PM	Helium valve closed
5/6/2010	8:32:51 PM	H2 valve closed
5/6/2010	8:32:51 PM	BCl3 valve closed
5/6/2010	8:32:51 PM	PH3 valve closed
5/6/2010	8:32:51 PM	SiCl4 pre valve closed
5/6/2010	8:32:51 PM	SiCl4 post valve closed
5/6/2010	8:32:51 PM	Main Vac valve closed
5/6/2010	8:32:51 PM	Bubbler valve closed
5/6/2010	8:32:51 PM	Bypass valve opened
5/6/2010	8:32:51 PM	Helium MFC set to  0.000000
5/6/2010	8:32:51 PM	H2 MFC set to  0.000000
5/6/2010	8:32:51 PM	BCl3 MFC set to  0.000000
5/6/2010	8:32:51 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:32:51 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:32:51 PM	Tube furnace set to 0
5/6/2010	8:33:21 PM	Helium valve closed
5/6/2010	8:33:21 PM	H2 valve closed
5/6/2010	8:33:21 PM	BCl3 valve closed
5/6/2010	8:33:21 PM	PH3 valve closed
5/6/2010	8:33:21 PM	SiCl4 pre valve closed
5/6/2010	8:33:21 PM	SiCl4 post valve closed
5/6/2010	8:33:21 PM	Bubbler valve closed
5/6/2010	8:33:21 PM	Main Vac valve opened
5/6/2010	8:33:21 PM	Bypass valve opened
5/6/2010	8:33:21 PM	Helium MFC set to  0.000000
5/6/2010	8:33:21 PM	H2 MFC set to  0.000000
5/6/2010	8:33:21 PM	BCl3 MFC set to  0.000000
5/6/2010	8:33:21 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:33:21 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:33:22 PM	Tube furnace set to 0
5/6/2010	8:38:22 PM	Helium valve closed
5/6/2010	8:38:22 PM	H2 valve closed
5/6/2010	8:38:22 PM	BCl3 valve closed
5/6/2010	8:38:22 PM	PH3 valve closed
5/6/2010	8:38:22 PM	SiCl4 pre valve closed
5/6/2010	8:38:22 PM	SiCl4 post valve closed
5/6/2010	8:38:22 PM	Bubbler valve closed
5/6/2010	8:38:22 PM	Main Vac valve opened
5/6/2010	8:38:22 PM	Bypass valve opened
5/6/2010	8:38:22 PM	Helium MFC set to  0.000000
5/6/2010	8:38:22 PM	H2 MFC set to  0.000000
5/6/2010	8:38:22 PM	BCl3 MFC set to  0.000000
5/6/2010	8:38:22 PM	SiCl4 MFC set to  0.000000
5/6/2010	8:38:22 PM	Bypass solenoid MFC set to  0.000000
5/6/2010	8:38:22 PM	Tube furnace set to 0
5/6/2010	8:38:23 PM	Run finished at 8:38 PM
5/6/2010	8:38:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
